Abstract: The article discusses the methodology for assessing the thickness distribution of vacuum coatings when spraying them from various devices. The thickness distribution of vacuum coatings deposited from evaporators with different indicatrixes on flat substrates in vacuum working chambers is estimated. The application of the developed computer program for the practical assessment of coating thicknesses is presented, which allows one to choose rational combinations of geometric factors during coating deposition. The results of vacuum deposition of metal functional coatings are consistent with the calculated data and make it possible to preliminarily estimate the degree of uniformity over the thickness of the formed coatings using simulation in the MathCAD program.
Index terms: vacuum deposition, condensate, indicatrix, computer programs, modeling

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